Patent · US Active

Microstructured sensor for the detection of IR radiation

US8465202B2 · kind B2 · utility

2Cited by
7References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 29, 2010
Grant dateJun 18, 2013
Priority date
Expiry dateJun 17, 2031

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/3504
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A microstructured sensor for detecting IR radiation includes: one measuring channel having a measuring diaphragm, on which a first sensitive detector surface is implemented for the absorption of a first IR radiation; and one reference channel having a reference diaphragm, on which a second sensitive detector surface is implemented for the absorption of a second IR radiation. A measuring structure, e.g., a thermopile measuring structure as a series circuit made of thermocouple pairs, is implemented between the measuring diaphragm and the reference diaphragm for measuring a temperature differential between the measuring diaphragm and the reference diaphragm. First and second thermal contacts lie alternately on the two diaphragms.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.