Fabrication process of a microfabricated blazed grating
US8465660B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2007 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Jul 17, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/141
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A blazed grating is disclosed as well as mode hop-free tunable lasers and a process for fabricating gratings of this type. The grating lies in a general plane and includes a plurality of elongate beams carrying mutually parallel respective reflection surfaces spaced apart from one another with a predefined pitch, each of these reflection surfaces having a normal direction inclined at a grating angle α to the normal direction of the general plane. The grating includes a plurality of resilient suspension arms connected to the beams and intended to be fastened to a grating support. A first pair of comb electrodes is provided for applying a mechanical force to this assembly, being placed on a first side of the grating, along an axis transverse to the beams, and designed so as to allow the pitch of the grating to be modified in response to the application of the mechanical force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.