Patent · US Active

Immersion objective lens, retention mechanism for immersion medium, and manufacturing method thereof

US8465709B2 · kind B2 · utility

4Cited by
5References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 5, 2010
Grant dateJun 18, 2013
Priority date
Expiry dateDec 2, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T436/25
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

There is provided a retention mechanism for an immersion medium, for use in a device which observes/measures a sample by use of an immersion objective lens, includes a member which retains the immersion medium near a tip portion of the objective lens, wherein the member is configured to include at least first and second materials.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.