Immersion objective lens, retention mechanism for immersion medium, and manufacturing method thereof
US8465709B2 · kind B2 · utility
4Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2010 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Dec 2, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/25
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is provided a retention mechanism for an immersion medium, for use in a device which observes/measures a sample by use of an immersion objective lens, includes a member which retains the immersion medium near a tip portion of the objective lens, wherein the member is configured to include at least first and second materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.