Sample holder providing interface to semiconductor device with high density connections
US8466432B2 · kind B2 · utility
17Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2011 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Apr 12, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A novel specimen holder for specimen support specimen support devices for insertion in electron microscopes. The novel specimen holder of the invention provides mechanical support for specimen support devices and as well as electrical contacts to the specimens or specimen support devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.