Element array, electromechanical conversion device, and process for producing the same
US8466522B2 · kind B2 · utility
3Cited by
3References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2009 |
| Grant date | Jun 18, 2013 |
| Priority date | — |
| Expiry date | Feb 6, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.