Methods for making capacitive microphone
US8468665B2 · kind B2 · utility
3Cited by
4References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 15, 2011 |
| Grant date | Jun 25, 2013 |
| Priority date | — |
| Expiry date | Sep 3, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of manufacturing a capacitive microphone comprises providing a substrate having at least one cavity. The method further comprises forming a backplate on the substrate, wherein the backplate has a plurality of holes, and forming a diaphragm on the backplate, wherein there are a first distance and a second distance between the diaphragm and the backplate. The method still further comprises forming an air gap between the backplate and the diaphragm through the first distance, and fastening the diaphragm to the backplate through the second distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.