Patent · US Active

Yaw rate sensor and method for operating a yaw rate sensor

US8468886B2 · kind B2 · utility

0Cited by

2References

9Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Carsten Geckeler · Lörrach, DE
Udo-Martin Gomez · Leonberg, DE
Thorsten Balslink · Kirchentellinsfurt, DE

Key dates

Filing date	Oct 5, 2010
Grant date	Jun 25, 2013
Priority date	—
Expiry date	Aug 11, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5755
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A yaw rate sensor includes a substrate which has a main plane of extension and a Coriolis element which is movable relative to the substrate. The yaw rate sensor has an excitation arrangement for exciting a drive oscillation of the Coriolis element along a first direction parallel to the main plane of extension. The yaw rate sensor has a detection arrangement for detecting a Coriolis deflection of the Coriolis element along a third direction which is perpendicular to the main plane of extension. In addition, the yaw rate sensor has a quadrature compensation structure which includes a comb electrode structure and a plate capacitor structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.