Apparatus for continuous coating

US8470094B2 · kind B2 · utility

Assignee

• VON ARDENNE Anlagentechnik GmbH · DE

Inventors

• Hubertus Von Der Waydbrink · Dresden, DE
• Siegfried Scheibe · Dresden, DE
• Jens Meyer · Dresden, DE
• Andrej Wolf · Dresden, DE
• Uwe TRAEBER · Elstra, DE
• Michael Hentschel · Dresden, DE

Key dates

• Filing date: Nov 10, 2011
• Grant date: Jun 25, 2013
• Expiry date: Nov 10, 2031

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/4401
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.