Apparatus and method for deep ultraviolet optical microscopy
US8472111B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 12, 2007 |
| Grant date | Jun 25, 2013 |
| Priority date | — |
| Expiry date | Dec 30, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/16
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus and method for performing optical microscopy are disclosed. In at least one embodiment, the apparatus includes a deep ultraviolet light source configured to generate light having a wavelength within a window in the deep ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. Further, the apparatus includes a lens device that receives at least a first portion of the generated light, directs at least some of the first portion of the generated light toward a location, receives reflected light from the location, and directs at least some of the reflected light toward a further location. Additionally, the apparatus includes a camera device that is positioned at one of the further location and an additional location, where the camera device receives at least a second portion of the reflected light, whereby an image is generated by the camera device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.