Patent · US Active

Scanning probe microscope with compact scanner

US8474060B2 · kind B2 · utility

2Cited by

3References

20Claims

0Family size

Assignee

Bruker Nano, Inc. · US

Inventors

Nghi Phan · Lompoc, US
Jeff Markakis · Lompoc, US
Johannes Kindt · Weimar, DE
Carl Masser · Lompoc, US

Key dates

Filing date	Apr 29, 2011
Grant date	Jun 25, 2013
Priority date	—
Expiry date	Apr 29, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB82Y35/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.