Method for making toughening agent materials
US8475666B2 · kind B2 · utility
1Cited by
70References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2004 |
| Grant date | Jul 2, 2013 |
| Priority date | — |
| Expiry date | Dec 29, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A toughening agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent selected from the group consisting of an amine, an onium compound and an alkali metal hydroxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.