Method for manufacturing and scribing a thin-film solar cell

US8476097B2 · kind B2 · utility

Assignee

• Oerlikon Solar AG, Trubbach · CH

Inventor

• Jiri Springer · Dresden, DE

Key dates

• Filing date: Aug 28, 2008
• Grant date: Jul 2, 2013
• Expiry date: May 25, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E10/50
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A method for manufacturing a thin-film solar cell includes providing a first conducting layer on a substrate that has an area at least 0.75 m2. The first conducting layer is located in a deposition portion of the area. An ultraviolet laser beam is applied through a lens to the first conducting layer. Portions of the first conducting layer are scribed form a trench through the layer. The lens focuses the beam and has a focal length at least 100 mm. The focused beam includes an effective portion effective for the scribing and an ineffective portion ineffective for the scribing. The substrate sags and the first conducting layer remains in the effective portion of the focused beam across the area during the step of applying. One or more active layers are provided on the first conducting layer. A second conducting layer is provided on the one or more active layers.