Laser systems and methods using triangular-shaped tailored laser pulses for selected target classes
US8476552B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Apr 2, 2010 |
| Grant date | Jul 2, 2013 |
| Priority date | — |
| Expiry date | Jun 22, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0057
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. At least one of the predefined temporal pulse profiles may be triangular. The target class may include, for example unpassivated electrically conductive links or other bare metal structures. Based on the target class associated with the selected target, a laser pulse is generated having a triangular temporal pulse profile. The generated laser pulse is used to process the selected structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.