Apparatus and method for wafer level classification of light emitting device
US8476918B2 · kind B2 · utility
6Cited by
29References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 28, 2010 |
| Grant date | Jul 2, 2013 |
| Priority date | — |
| Expiry date | Nov 12, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides a semiconductor test system. The semiconductor test system includes a wafer stage to hold a wafer having a plurality of light emitting devices (LEDs); a probe test card operable to test each test field of the wafer; and a light detector integrated with the probe test card to collect light from a LED of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.