Micro scale mechanical rate sensors
US8479574B2 · kind B2 · utility
3Cited by
22References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2010 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Feb 22, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular rate sensor device is presented. The sensor device comprises a disk-shaped structure having a proof mass region and a flexible portion. The disk-like structure is coupled to a substrate in a manner enabling a wave type precession motion such that during the wave type precession motion each material point of the proof mass performs elliptic motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.