Microfluidic-channel embeddable, laterally oscillating gravimetric sensor device fabricated with micro-electro-mechanical systems (MEMS) technology
US8480956B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Aug 20, 2009 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Aug 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/11
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Laterally oscillating gravimetric sensing device embeddable under micro-fluidic channels and fabricated with micro-electro mechanical systems (MEMS) technology, which detects biological cells and analytes by measuring the change of mass attached on its surface is composed of four main groups, namely a resonator that can be placed onto the basis of the channel, components of the resonator bio-activation, a micro fluidic channel, and the microfabrication techniques, and its main components are the proof mass (1), comb fingers fixed to proof mass (2), folded spring beams (3), channel floor and mechanical soil (4), stationary electrodes (5), comb fingers attached to the stationary electrodes (6), golden film deposited onto the mass (7), immobilized biologic recognition molecules (8), and micro fluidic channel placed on resonator structure (9).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.