Modular system and process for continuous deposition of a thin film layer on a substrate

US8481355B2 · kind B2 · utility

Assignee

• PrimeStar Solar, Inc. · US

Inventors

• Mark Jeffrey Pavol · Arvada, US
• Russell Weldon Black · Longmont, US
• Brian Murphy · Pfarrkirchen, DE
• Christopher Rathweg · Lafayette, US
• Edwin Jackson Little · Denver, US
• Max William Reed · Niwot, US

Key dates

• Filing date: Dec 15, 2009
• Grant date: Jul 9, 2013
• Expiry date: Nov 6, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A system and associated process for vapor deposition of a thin film layer on a photovoltaic (PV) module substrate is includes establishing a vacuum chamber and introducing the substrates individually into the vacuum chamber. A conveyor system is operably disposed within the vacuum chamber and is configured for conveying the substrates in a serial arrangement through a vapor deposition apparatus within the vacuum chamber at a controlled constant linear speed. A post-heat section is disposed within the vacuum chamber immediately downstream of the vapor deposition apparatus in the conveyance direction of the substrates. The post-heat section is configured to maintain the substrates conveyed from the vapor deposition apparatus in a desired heated temperature profile until the entire substrate has exited the vapor deposition apparatus.