Electron spectroscopy
US8481931B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 11, 2009 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Aug 23, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0815
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.