Laser processing apparatus and laser processing method
US8482829B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2009 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Nov 24, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2225/32
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser processing apparatus 1 includes a laser light source 10, a phase modulation type spatial light modulator 20, a driving unit 21, a control unit 22, and an imaging optical system 30. The imaging optical system 30 may be a telecentric optical system. A storage unit 21A included in the driving unit stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern. The control unit 22 arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit 21A, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator 20.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.