MEMS device and method of manufacturing the same
US8482843B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2009 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Nov 12, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS device includes a mirror substrate (200), an electrode substrate (301) arranged so as to face the mirror substrate (200), a mirror (230) serving as a movable member rotatably supported in an opening portion of the mirror substrate (200) via support members, a driving electrode (101) arranged on an insulating film (104) on a surface of the electrode substrate (301) facing the mirror substrate (200) so as to face the mirror (230) across a gap and drive the mirror (230), and a lower electrode (103) made of a metal or a semiconductor and formed under the insulating film (104) exposed to the gap so as to be in contact with the insulating film (104).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.