Apparatus for inspecting and measuring object to be measured
US8483444B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2008 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Apr 22, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2545
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting and measuring an object to be measured includes: a distance measurement device having a light projector that projects a two-dimensional optical pattern onto a measurement target of the measurement object, imaging devices disposed in a stereoscopic arrangement that image the measurement object, and a driving device that rotates a posture of at least one of the imaging devices to control a parallax angle between the imaging devices; a working distance control device that controls the driving device and adjusts a position at which optical axes of the imaging devices intersect; and a distance calculation device having a correspondence position calculation device that determines a correspondence position at which the same region is imaged among images of the imaging devices, and a distance calculation devices that calculates a distance to the measurement target of the measurement object based on a calculation result of the calculation device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.