Microprobe, measurement system and method
US8484755B2 · kind B2 · utility
2Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2008 |
| Grant date | Jul 9, 2013 |
| Priority date | — |
| Expiry date | Jun 21, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexing of the flexure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.