Patent · US Active

Device for oscillation excitation of an elastic bar fastened on one side in an atomic force microscope

US8484757B2 · kind B2 · utility

0Cited by

5References

28Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Walter Arnold · Saarburg, DE
Kerstin Meder · Dillingen/Saar, DE
Ute Rabe · Saarburg, DE

Key dates

Filing date	Jun 30, 2006
Grant date	Jul 9, 2013
Priority date	—
Expiry date	Jul 27, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01Q60/38
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device for oscillation excitation of a leaf spring, which is fastened on one side in an atomic force microscope (AFM) and comprises semiconductor material, which has no piezoelectric properties, a free end to which a tip is attached, which is brought into contact with a sample surface to be examined. The present invention has the leaf spring connected at least sectionally to a metal layer to form a Schottky contact, and an electrical voltage or field source is provided, which generates an electrical AC voltage a vicinity or area of the Schottky contact.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.