Coating apparatus including a glove part and a controller for stopping coating
US8485126B2 · kind B2 · utility
2Cited by
29References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 1, 2010 |
| Grant date | Jul 16, 2013 |
| Priority date | — |
| Expiry date | Jul 10, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/541
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A coating apparatus including a coating part which applies a liquid material including an oxidizable metal on a substrate; a chamber having a coating section in which the coating part applies the liquid material on the substrate and a transport section into which the liquid material is transported; an adjusting part which adjusts at least one of oxygen concentration and humidity inside the chamber; and a control part which stops an operation of the coating part in response to the entrance of foreign object into the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.