Methods for fabrication of positional and compositionally controlled nanostructures on substrate

US8486287B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Ji Zhu · Corona, US
• Jeff Grunes · Beaverton, US
• Yang-Kyu Choi · Seojong-myeon, KR
• Jeffrey Bokor · Oakland, US
• Gabor A. Somorjai · Berkeley, US

Key dates

• Filing date: Oct 14, 2004
• Grant date: Jul 16, 2013
• Expiry date: May 22, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D30/62
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Fabrication methods disclosed herein provide for a nanoscale structure or a pattern comprising a plurality of nanostructures of specific predetermined position, shape and composition, including nanostructure arrays having large area at high throughput necessary for industrial production. The resultant nanostracture patterns are useful for nanostructure arrays, specifically sensor and catalytic arrays.