Patent · US Active

Semiconductor device and method of manufacturing semiconductor device

US8487375B2 · kind B2 · utility

6Cited by
4References
14Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 25, 2010
Grant dateJul 16, 2013
Priority date
Expiry dateNov 19, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/62
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a compound semiconductor layer provided over a substrate, a plurality of source electrodes and a plurality of drain electrodes provided over the compound semiconductor layer, a plurality of first vias each of which is configured to pass through the compound semiconductor layer and be coupled to a corresponding one of the plurality of source electrodes, a plurality of second vias each of which is configured to pass through the compound semiconductor layer and be coupled to a corresponding one of the plurality of drain electrodes, a common source wiring line configured to be coupled to the plurality of first vias and be buried in the substrate, and a common drain wiring line configured to be coupled to the plurality of second vias and be buried in the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.