Fabrication of a floating rocker MEMS device for light modulation
US8488230B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2010 |
| Grant date | Jul 16, 2013 |
| Priority date | — |
| Expiry date | Feb 26, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.