Patent · US Active

Variable density scanning

US8489356B2 · kind B2 · utility

2Cited by

12References

33Claims

0Family size

Assignees

Oxford Instruments PLC · GB
Oxford Instruments AFM Inc · US

Inventors

Roger Proksch · Lompoc, US
Roger C. Callahan · Goleta, US

Key dates

Filing date	May 10, 2011
Grant date	Jul 16, 2013
Priority date	—
Expiry date	Jan 10, 2032

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB82Y35/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.