Relative pressure sensor

US8490494B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Davide Parrotto · Weil am Rhein, DE
• Anh Tuan Tham · Berlin, DE
• Frank Passler · Berlin, DE
• Olaf Krusemark · Kassel, DE
• Ulrich Buder · Berlin, DE

Key dates

• Filing date: Aug 12, 2009
• Grant date: Jul 23, 2013
• Expiry date: Jan 23, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/147
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A relative pressure sensor for registering pressure of a medium relative to surrounding atmospheric pressure includes: a pressure measuring cell having a measuring membrane and a platform, wherein pressure of the medium can act on a first side of the measuring membrane facing away from the platform, and wherein the platform has a reference air opening, through which surrounding atmospheric pressure can act on a second side of the measuring membrane facing the platform. A support body, through which a reference air duct extends between a first surface section and a second surface section of the support body is provided, wherein the pressure measuring cell is affixed to the support body with a pressure resistant, bonded adhesive. The reference air opening communicates with the reference air duct, in order to form a reference air path to the measuring membrane, wherein the bonded adhesive surrounds the reference air path, and the relative pressure sensor further includes a shield element, which protects the bonded adhesive from direct contact with reference air.