Microelectromechanical (MEMS) pressure transducer
US8490497B2 · kind B2 · utility
2Cited by
8References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2011 |
| Grant date | Jul 23, 2013 |
| Priority date | — |
| Expiry date | Sep 7, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer for measuring pressure may include an all-polymer chamber that has no dimension greater than 1 mm. There may be fluid within the chamber, a gaseous bubble trapped within the fluid, and electrodes in contact with the fluid. The electrodes may enable a measurement of changes in the impedance of the fluid caused by changes in the volume of the gaseous bubble caused by changes in the pressure to be measured.The pressure transducer may be made by depositing the chamber, placing the fluid within the chamber, and generating the gaseous bubble within the fluid with electrolysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.