MEMS resonator for filtering and mixing
US8493157B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2009 |
| Grant date | Jul 23, 2013 |
| Priority date | — |
| Expiry date | Jun 18, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/2442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.