Aerostatically guided table system for vacuum application

US8496221B2 · kind B2 · utility

Assignee

• VISTEC ELECTRON BEAM GMBH · DE

Inventors

• Gerhard Schubert · Jena, DE
• Christian Jackel · Landsberg, DE
• Ulf-Carsten Kirschstein · Jena, DE
• Michael Boehm · Waukesha, US
• René Bauer · Schweinfurt, DE
• Gerd Harnisch · Jena, DE
• Thomas Peschel · Jena, DE
• Stefan Risse · Jena, DE
• Christoph Schenk · Icking, DE

Key dates

• Filing date: Nov 16, 2009
• Grant date: Jul 30, 2013
• Expiry date: May 30, 2032

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T74/20348
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.