Patent · US Active

Long range travel MEMS actuator

US8497619B2 · kind B2 · utility

4Cited by

6References

24Claims

0Family size

Assignee

SI-WARE SYSTEMS · EG

Inventors

Mostafa Medhat · Cairo, EG
Yasseen Nada · Shubra al Khayma, EG
Bassem Mortada · Cairo, EG
Bassam A. Saadany · Cairo, EG

Key dates

Filing date	Apr 16, 2010
Grant date	Jul 30, 2013
Priority date	—
Expiry date	Aug 27, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T74/20558
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.