Capacitive micro-switch comprising a charge drain based on oriented nanotubes on the bottom electrode and method of fabrication
US8497751B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2010 |
| Grant date | Jul 30, 2013 |
| Priority date | — |
| Expiry date | Feb 9, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2300/036
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to an electrostatic actuation micro-switch of capacitor type composed of two plates, the first of which is a flexible membrane and the second of which comprises at least one control electrode, the two plates being separated by a thickness of vacuum or gas and at least one layer of at least one electrical insulating material situated on the control electrode characterized in that it furthermore comprises a charge drain consisting of oriented conducting nanotubes on the surface of the said electrode, the said drain being overlaid with the said layer of electrical insulating material. The subject of the invention is also a method for fabricating the micro-switch according to the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.