Patent · US Active

Acid amplifiers

US8501382B1 · kind B1 · utility

3Cited by
1References
27Claims
0Family size

Assignee

Inventor

Key dates

Filing dateFeb 19, 2010
Grant dateAug 6, 2013
Priority date—
Expiry dateApr 25, 2031

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC07C2601/08
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.