Integrated micro actuator and IVDT for high precision position measurements
US8502525B2 · kind B2 · utility
5Cited by
1References
30Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 14, 2009 |
| Grant date | Aug 6, 2013 |
| Priority date | — |
| Expiry date | Sep 6, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F21/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.