High brightness excimer lamp
US8506342B2 · kind B2 · utility
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5References
4Claims
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Assignee
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Key dates
| Filing date | Sep 28, 2011 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Sep 28, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J61/103
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high brightness excimer light source has an elongated tube containing an excimer-forming gas and electrodes for exciting the gas to form a plasma, and thus create excimers such as a rare gas halogen excimer or a rare gas excimer. Light emitted from the excimer propagating axially along the tube passes out of the tube through an exit device such as a lens or optical fiber at one or both ends of the tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.