Drive end-block for a rotatable magnetron
US8506773B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2009 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Aug 3, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3455
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A drive end block for a magnetron arrangement with a rotating target, comprises an end block housing having a rotatably mounted drive shaft. The drive shaft is arranged in the end block housing, accessible at an end from outside of the end block housing for connection to the rotating target, and adapted at its end inside the end block housing for introduction of a torque. An electric motor with a stator and a rotor for creating the torque is arranged inside the end block housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.