Short pitch metal gratings and methods for making the same
US8506827B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2009 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Jun 2, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/3058
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Methods for forming a metal grating include providing a first grating including a plurality of grating lines formed from a dielectric material, each grating having a pair of sidewalls, facing sidewalls of adjacent grating lines being separated by corresponding trenches, the grating lines and trenches forming a grating surface; forming a layer of a metal on the grating surface, where the metal layer has a constant thickness and conforms to the grating surface; and removing portions of the metal layer between sidewalls of adjacent grating lines of the first grating to form a metal grating having grating lines formed from the metal, the grating lines of the metal grating corresponding to the portions of the metal layer adjacent the sidewalls of the grating lines of the first grating. The metal grating has a pitch of 200 nm or less, a depth of 50 nm or more, and the grating lines of the metal grating have an aspect ratio of 10-to-1 or more.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.