Method and system for providing a magnetic recording transducer using an ion beam scan polishing planarization
US8506828B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2011 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Oct 11, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49043
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method and system for fabricating a read sensor on a substrate for a read transducer is described. A read sensor stack is deposited on the substrate. A mask is provided on the on the read sensor stack. The mask has a pattern that covers a first portion of the read sensor stack corresponding to the read sensor, covers a second portion of the read sensor stack distal from the read sensor, and exposes a third portion of the read sensor stack between the first and second portions. The read sensor is defined from the read sensor stack. A hard bias layer is deposited. An aperture free mask layer including multiple thicknesses is provided. A focused ion beam scan (FIBS) polishing step is performed on the mask and hard bias layers to remove a portion of the mask and hard bias layers based on the thicknesses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.