Patent · US Active

Method for producing at least one microcomponent with a single mask

US8507031B2 · kind B2 · utility

1Cited by

8References

14Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Steve Martin · Vernouillet, FR
Nicolas Dunoyer · Grenoble, FR
Sami Oukassi · Saint-Égrève, FR
Raphael Salot · Le Pont-de-Claix, FR

Key dates

Filing date	Jun 9, 2010
Grant date	Aug 13, 2013
Priority date	—
Expiry date	Nov 20, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The microcomponent, for example a microbattery, comprising a stack with at least two superposed layers on a substrate, is made using a single steel mask able to expand under the effect of temperature. The mask comprises at least one off-centered opening. The mask being at a first temperature, a first layer is deposited through the opening of the mask. The mask being at a second temperature, higher than the first temperature, a second layer is deposited through the opening of the mask. Finally, the mask being at a third temperature, higher than the second temperature, a third layer is deposited through the opening of the mask.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.