Reduced stiction MEMS device with exposed silicon carbide
US8507306B2 · kind B2 · utility
4Cited by
7References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2010 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Jun 17, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0005
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS device has a first member that is movable relative to a second member. At least one of the first member and the second member has exposed silicon carbide with a water contact angle of greater than about 70 degrees.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.