Systems and methods for delivery of fluid-containing process material combinations
US8507382B2 · kind B2 · utility
5Cited by
37References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2008 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Nov 4, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8593
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.