Semiconductor device, method of fabricating the same, and semiconductor module and electronic system including the semiconductor device
US8507999B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2011 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Nov 6, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/021
Abstract
A semiconductor device includes a substrate including a cell area and a peripheral area, the cell area having an active region defined by an isolation region, a cell gate structure below an upper surface of the substrate in the cell area, the cell gate crossing the active region, a bit line structure above an upper surface of the substrate in the cell area, the bit line structure including bit line offset spacers on at least two side surfaces thereof, and a peripheral gate structure above an upper surface of the substrate in the peripheral area, the peripheral gate structure including peripheral gate offset spacers and peripheral gate spacers on at least two side surfaces thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.