Gimbaled scanning micro-mirror actuation scheme and architecture
US8508098B2 · kind B2 · utility
3Cited by
10References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 10, 2007 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Nov 21, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second DOF.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.