System, method and apparatus for a micromachined interferometer using optical splitting
US8508745B2 · kind B2 · utility
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21Claims
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Key dates
| Filing date | Aug 3, 2010 |
| Grant date | Aug 13, 2013 |
| Priority date | — |
| Expiry date | Aug 6, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Mach-Zehnder MEMS interferometer is achieved using two half plane beam splitters formed at respective edges of a first medium. The first beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two beams, a first one propagating in the first medium towards the second beam splitter and a second one propagating in a second medium. A moveable mirror in the second medium reflects the second beam back towards the second beam splitter to cause interference of the two beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.