Patent · US Active

Sensor element for capacitively measuring differential pressure

US8511168B2 · kind B2 · utility

1Cited by

1References

5Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Sven Zinober · Friolzheim, DE
Remigius Has · Grafenau, DE

Key dates

Filing date	Jul 26, 2011
Grant date	Aug 20, 2013
Priority date	—
Expiry date	Feb 16, 2032

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0127
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element for capacitively measuring differential pressure includes a sensor diaphragm which is implemented in a layered configuration on a semiconductor substrate and spans a cavern. A pressure connection opens into the cavern. The sensor element also includes a measuring capacitor which has a movable electrode on the sensor diaphragm, and a stationary counter electrode which is situated on the base of the cavern, opposite from the movable electrode. According to the sensor, the cavern is filled with a dielectric fluid.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.