In-situ determination of thin film and multilayer structure and chemical composition using x-ray fluorescence induced by grazing incidence electron beams during thin film growth
US8513603B1 · kind B1 · utility
21Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 2011 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Apr 23, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/634
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method utilizing characteristic x-ray emission from a single thin film or multilayer thin film when an electron beam impinges at a grazing angle with respect to the surface of the sample to capture structural and physical properties of the layers such as layer thickness, interfacial roughness, and stoichiometry of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.