Coating film inspection apparatus and inspection method
US8513608B2 · kind B2 · utility
5Cited by
1References
4Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 21, 2011 |
| Grant date | Aug 20, 2013 |
| Priority date | — |
| Expiry date | Feb 21, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The coating film inspection apparatus according to one embodiment of the present invention comprises a terahertz-wave generator that generates a terahertz-wave; an irradiation optical system that irradiates, with the terahertz-wave, a sample with a film formed thereon; a terahertz-wave detector that detects a terahertz-wave reflected at the sample; and a control unit that shows an electric field intensity of the detected terahertz-wave in wave form data on a time axis to detect a plurality of peaks from the wave form data, and also calculates film thickness on the basis of time difference between peaks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.