Patent · US Active

Thin film transistor having specified transmittance to light

US8513661B2 · kind B2 · utility

157Cited by
14References
8Claims
0Family size

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Inventors

Key dates

Filing dateJan 20, 2009
Grant dateAug 20, 2013
Priority date
Expiry dateJan 20, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/6734

Abstract

A first gate electrode (2) is formed on a substrate (1); a first gate insulating layer (3) is formed so as to cover the first gate electrode (2); a semiconductor layer (4) including an oxide semiconductor is formed on the first gate insulating layer (3); a second gate insulating layer (7) is formed on the semiconductor layer (4); a second gate electrode (8) having a thickness equal to or larger than a thickness of the first gate electrode (2) is formed on the second gate insulating layer (7); and a drain electrode (6) and a source electrode (5) are formed so as to be connected to the semiconductor layer (4).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.